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HOME > Specialty Chemicals > Electronic Materials > Triphenylsulfonium (3-hydroxytricyclo[3.3.1.13,7]decane-1-methoxycarbonyl)difluoromethane sulfonate
 

Triphenylsulfonium (3-hydroxytricyclo[3.3.1.13,7]decane-1-methoxycarbonyl)difluoromethane sulfonate

CAS NO. 912290-04-1

Product Code: CA002

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Category：

Photo acid generator

Chemical Name:

Triphenylsulfonium (3-hydroxytricyclo[3.3.1.13,7]decane-1-methoxycarbonyl)difluoromethane sulfonate

CAS NO.: 

 912290-04-1

Molecular Formula:

C31H32F2O6S2

Molecular Weight:

602.71

Application：

Photo acid generator for ArF or ArFi 

Purity:

99.5%min


Chemical structure

结构式




Related Keywords: photo acid generator,PAG
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